Sputtering plant with a loadlock, magazin of 5 carriers and a coating size of 1000x500mm².
Sputtering plant with loadlock, coating size 2400x900 mm². Biggest coating machine for supermirrors in the world. Strong vacuum pumps allow high throughput.
E-beam evaporator for the coating of non conductive material. We do for example coating of highly enriched Boron-10. Maximum coating size is 300x300 mm².